| 摘要 |
PROBLEM TO BE SOLVED: To surely maintain the adsorption power of a substrate holder. SOLUTION: The substrate holder includes a holder body held on a stage for mounting a substrate, an adsorption part for adsorbing the substrate to the holder body, and a plurality of receiving parts disposed at mutually different positions for receiving the supply of the adsorption power to the adsorption part. The plurality of receiving parts receive the supply of the adsorption power to the adsorption part in a state that the holder body is arranged on the stage. Also, the stage device includes a stage where the substrate holder holding the substrate is held, and a plurality of supply parts for supplying the substrate adsorption power to the plurality of receiving parts provided on the mutually different positions of the substrate holder. COPYRIGHT: (C)2011,JPO&INPIT |
