| 摘要 |
PROBLEM TO BE SOLVED: To easily inspect a material o be inspected based on a colored state in a test area. SOLUTION: A developed layer 12 in a specimen 10 is dotted with the specimen. The specimen 10 is inserted into an insertion opening 3 of a coloration analyzer 1. After a preset setting time elapses, colored states of the test area TL and a control area CL in an observation window 10Z are read as images P. After a preprocessing means 22 preprocesses the image P, a spatial frequency component of the image P is calculated. Pattern information PP is generated based on the spatial frequency component and displayed in an information output means 4. COPYRIGHT: (C)2011,JPO&INPIT |
