| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problem: it is necessary to miniaturize a piezoelectric actuator in accordance with achievement of high density and high integration, and also, it is necessary to enhance bonding accuracy with a diaphragm member. SOLUTION: Two piezoelectric members 12 and 12 are bonded and fixed side by side on a base member 13, and at both ends of each of the piezoelectric members 12, level difference formation parts 103A and 103B are disposed on the side of the surface bonded with the diaphragm member 3, and an alignment groove part 106 is disposed in an opposing surface 104 opposing the diaphragm member 3, of the level difference formation part 103A disposed at one end, and an opposing surface 107 opposing the diaphragm member 3, of the level difference formation part 103B disposed at the other end functions as an adhesive applying area for applying a temporary tacking adhesive 108. Between the adjacent piezoelectric members 12 and 12, the alignment groove parts 106 and the adhesive applying areas are arranged with a reverse relationship, and also, the alignment groove part 106 and the adhesive applying area disposed on the same end side are arranged in an overlapped state in a short-side direction of the piezoelectric members 12, 12. COPYRIGHT: (C)2011,JPO&INPIT |
