发明名称 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 A non-volatile semiconductor storage device includes: a memory cell area in which a plurality of electrically rewritable memory cells are formed; and a peripheral circuit area in which transistors that configure peripheral circuits to control the memory cells are formed. The memory cell area has formed therein: a semiconductor layer formed to extend in a vertical direction to a semiconductor substrate; a plurality of conductive layers extending in a parallel direction to, and laminated in a vertical direction to the semiconductor substrate; and a property-varying layer formed between the semiconductor layer and the conductive layers and having properties varying depending on a voltage applied to the conductive layers. The peripheral circuit area has formed therein a plurality of dummy wiring layers that are formed on the same plane as each of the plurality of conductive layers and that are electrically separated from the conductive layers.
申请公布号 US2011233652(A1) 申请公布日期 2011.09.29
申请号 US201113156727 申请日期 2011.06.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHINO YASUHIRO;SATO ATSUHIRO;KAMIGAICHI TAKESHI;ARAI FUMITAKA
分类号 H01L27/115 主分类号 H01L27/115
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