发明名称 CDTE SEMICONDUCTOR SUBSTRATE FOR EPITAXIAL GROWTH AND SUBSTRATE CONTAINER
摘要 Provided is a CdTe-based semiconductor substrate for epitaxial growth, which is capable of growing good-quality epitaxial crystals without urging a substrate user to implement etching treatment before the epitaxial growth. A CdTe-based semiconductor substrate, in which tracks of linear polishing damage with a depth of 1 nm or more are not observed within a viewing range of 10 μm×10 μm when a surface of the substrate is observed by an atomic force microscope, and orange peel defects are not observed when the surface of the substrate is visually observed under a fluorescent lamp, can grow the good-quality epitaxial crystals.
申请公布号 US2011233729(A1) 申请公布日期 2011.09.29
申请号 US201013131614 申请日期 2010.09.30
申请人 SUZUKI KENJI;TANIGUCHI HIDEYUKI;KURTA HIDEKI;HIRANO RYUICHI 发明人 SUZUKI KENJI;TANIGUCHI HIDEYUKI;KURTA HIDEKI;HIRANO RYUICHI
分类号 H01L29/22;B65D85/00 主分类号 H01L29/22
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