发明名称 ENHANCED BONDING INTERFACES ON CARBON-BASED MATERIALS FOR NANOELECTRONIC DEVICES
摘要 Semiconductor structures and electronic devices are provided that includes at least one layer of an interfacial dielectric material located on an upper surface of a carbon-based material. The at least one layer of interfacial dielectric material has a short-range crystallographic bonding structure, typically hexagonal, that is the same as that of the carbon-based material and, as such, the at least one layer of interfacial dielectric material does not change the electronic structure of the carbon-based material. The presence of the at least one layer of interfacial dielectric material having the same short-range crystallographic bonding structure as that of the carbon-based material improves the interfacial bonding between the carbon-based material and any overlying material layer, including a dielectric material, a conductive material or a combination of a dielectric material and a conductive material. The improved interfacial bonding in turn facilitates formation of devices including a carbon-based material.
申请公布号 US2011233513(A1) 申请公布日期 2011.09.29
申请号 US20100748542 申请日期 2010.03.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DIMITRAKOPOULOS CHRISTOS D.;FARMER DAMON B.;GRILL ALFRED;GATES STEPHEN M.;VO TUAN A.;NEUMAYER DEBORAH A.;NGUYEN SON VAN
分类号 H01L29/16;C30B23/02;H01L21/04 主分类号 H01L29/16
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