| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent erroneous detection in detecting a foreign matter, which is caused by a change in distance between a sample and an X-ray detector. <P>SOLUTION: An X-ray transmission inspection apparatus includes an X-ray tube 11 that irradiates an inspection object sample with an X-ray, an X-ray detector 13 that detects a transmission X-ray when the X-ray is transmitted through the sample, an operation part 17 that obtains a contrast image from a transmission image of a transmission X-ray, a sensor that calculates a distance between the sample and the detector, and a mechanism that adjusts the position of the X-ray detector, in which an X-ray transmission image is picked up while the distance between the sample and the X-ray detector is kept constant. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
