| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance device capable of suppressing the damage to a substrate due to contact with a foreign substance adhered to a substrate contact surface of a roller for conveyance, while it is difficult to prevent the adhesion of a foreign substance, as the contact area between the roller for conveyance and the substrate is large when the substrate is directly conveyed without being loaded on a tray or the like by a roller conveyance system. SOLUTION: In the substrate conveyance device conveying a substrate by rotating a plurality of roller shafts arranged in the conveyance direction of the substrate and connected to a driving system, an integrated roller is formed by alternately connecting a plurality of ring rollers, each of which is narrow in width and has different radius, to the plurality of roller shafts, and a plurality of rollers are arranged on the roller shaft. COPYRIGHT: (C)2011,JPO&INPIT
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