| 摘要 |
PROBLEM TO BE SOLVED: To install a pressure detection sensor that detects the pressure inside a space between a furnace body, and to provide a processing container having a simple structure. SOLUTION: A vertical heat treatment apparatus 1 includes a furnace body 5 having a heater element 18; and a processing container 3 arranged in the furnace body 5 and that houses a processed body w to carry out the heat treatment. An air supply line 52 and an air exhaust line 62 are connected to the furnace body 5. An air supply blower 53 and an air supply line side valve mechanism 54A are arranged in the air supply line 52. An air exhaust blower 63 and an air exhaust line side valve mechanism 64A are arranged in the air exhaust line 62. A protective tube 50a, that penetrates the furnace body 5 and in which a temperature sensor signal line 83 is housed, is provided, and a pressure detection hole 85 is formed in the protection tube 50a. A pressure detection sensor 80 is connected to the pressure detection hole 85. COPYRIGHT: (C)2011,JPO&INPIT |
