| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure controller for giving both a positive pressure and a negative pressure by simple facility configurations. <P>SOLUTION: An exhaust passage area 23 is provided with a branch passage area 24 connecting an air supply passage area 21 to an exhaust port 14. The branch passage area 24 is formed to be branched from the air supply passage area 21, and provided with a negative pressure generation area 25. A nozzle 31 and a suction space 34 are formed in the negative pressure generation area 25. A suction passage area 36 is formed to be branched to an electromagnetic valve 17 for exhaust side in the suction space 34. When operation air shunted from the air supply passage area 21 to the negative pressure generation area 25, passes through the nozzle 31, the pressure reduction of the inside of the suction space 34 is carried out, and a negative pressure is given to the suction passage area 36 side. Then, when the opening control of the electromagnetic valve 17 for exhaust is carried out, the negative pressure is given to an output port 15. <P>COPYRIGHT: (C)2011,JPO&INPIT |
