| 摘要 |
PROBLEM TO BE SOLVED: To enhance sensitivity in detecting charged-up charges. SOLUTION: An evaluation element includes an insulating film 14, formed on a semiconductor substrate 10; first wiring lines 20 formed within the insulating film and having an extension 22 extended in an extension direction; contacts 26 provided within the insulating film to electrically connect the semiconductor substrate and the extension; second wiring lines 30, having a counter part 32 formed within the insulating film to be opposite to a face direction of the semiconductor substrate and to be smaller in length than the extension and also having a lead part 34, extending from the counter part to a direction facing the first wiring lines; and an antenna electrode 40 electrically connected to the lead part. COPYRIGHT: (C)2011,JPO&INPIT |
