| 摘要 |
PROBLEM TO BE SOLVED: To provide a joint device that allows quick motion and highly accurate position control, and a substrate transporting device. SOLUTION: The joint device includes a first parallel link, a second parallel link, and a transmission mechanism. The first parallel link has a first lever that enables a first rotation centering a first fulcrum and a second lever that enables a second rotation centering a second fulcrum. The second parallel link has a third lever that enables a third rotation centering the first fulcrum and a fourth lever that enables a fourth rotation centering the second fulcrum. The transmission mechanism has: a first gear rotating with the first rotation centering the first fulcrum; a second gear rotating with the second rotation centering the second fulcrum; a third gear rotating by engaging with the first and second gears; and a connecting portion synchronizing the third gear rotation, the third rotation, and the fourth rotation. The transmission mechanism interlocks drives of the first parallel link and the second parallel link. COPYRIGHT: (C)2011,JPO&INPIT
|
