| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for an electronic device which is excellent in high frequency transmission characteristics in a high frequency region and inexpensive, and has an insulation structure excellent in chemical stability, electric insulation properties, resistance to a thermal shock and resistance to heat distortion, and the electronic device. SOLUTION: An annular insulative area 3 includes an inorganic insulation layer 33 mainly containing glass. The inorganic insulation layer 33 is filled in an annular groove 30 formed to surround a vertical conductor 2 on a semiconductor substrate 1. COPYRIGHT: (C)2011,JPO&INPIT
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