| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device capable of efficiently cleaning a workpiece while suppressing the attachment of the workpiece to the inner circumferential surface of a container and capable of simply taking out the workpiece from the container. SOLUTION: A cleaning bottle 10 in which a quartz chip (workpiece) having a rectangular flat plate shape is stored in a tubular part 11 and the quartz chip is cleaned with a cleaning liquid supplied into the tubular part 11 has a rugged part 31 formed on the inner circumferential surface of the tubular part 11, wherein a pitch P1 of the rugged part 31 is set to be narrower than the shortest width of the quartz chip as viewed from the thickness direction of the quartz chip. COPYRIGHT: (C)2011,JPO&INPIT
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