发明名称 FILM FORMING APPARATUS AND FILM FORMING METHOD
摘要 <p>Disclosed is an ink-jet method film forming apparatus (100) comprising a head section (50) of a length that traverses a substrate (20) and includes a nozzle (72) that discharges a solution onto the substrate (20); a stage (10) that holds the substrate (20); a movement device (30) that relatively moves the head section (50) and the stage (10); and a control device (35) that controls discharge from the nozzle (72) and movement of the movement device (30). The control device (35) executes a second step (b) that controls the movement device (30) such that a solution discharged a second time (52) is discharged at the same location as a solution discharged a first time (51) in a first step (a), which thereby reduces the occurrence of regions that are not coated during the ink-jet coating process.</p>
申请公布号 WO2011118651(A1) 申请公布日期 2011.09.29
申请号 WO2011JP57027 申请日期 2011.03.23
申请人 SHARP KABUSHIKI KAISHA;MIYAURA, HIROAKI;SHIOZAKI, TADASHI;NIIHATA, HIROAKI 发明人 MIYAURA, HIROAKI;SHIOZAKI, TADASHI;NIIHATA, HIROAKI
分类号 B05C5/00;B05C9/06;B05D1/26;G02F1/1337 主分类号 B05C5/00
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