| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method which can improve efficiency in complexing a metal that has deposited on an inner part of a container, and to provide a treatment apparatus therefor. SOLUTION: In a cleaning process of supplying a gas to the inner part of the container to combine the metal having deposited on the inner part of the container with the supplied gas, and making a metal compound formed of the combined metal and gas vaporize to clean the container, this cleaning method includes the first step of supplying an oxidizing gas or a halogenated gas to the inner part of the container to oxidize or halogenate the metal having deposited on the inner part of the container, and the second step of supplying a complexing gas to the inner part of the container to subject the metal which has been oxidized or halogenated to complexing treatment. COPYRIGHT: (C)2011,JPO&INPIT |
