PATTERN FORMING METHOD, AND TEMPLATE PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a pattern for imprinting having a high-accuracy fine pattern and to provide a template producing method. SOLUTION: A polymerizable resin layer 33 is formed on a substrate 31, and a prepared transparent template 10 for imprinting and the polymerizable resin layer 33 on the substrate 31 are superpose to shape the polymerizable resin layer 33 by a first pattern 13 being a pattern of the template 10 for imprinting, so that a second pattern 35 constituted of an unevenness being an inverted shape to the first pattern is formed on the polymerizable resin layer 33. A third pattern 37 constituted of an unevenness is formed on a surface of the substrate 31 by the second pattern 35 as a mask. COPYRIGHT: (C)2011,JPO&INPIT