A mold for nanoimprint including a liquid-crystalline polysilane and having a raised and recessed surface formed by the formation of a smectic phase due to the orientation of the liquid-crystalline polysilane.
申请公布号
US2011233820(A1)
申请公布日期
2011.09.29
申请号
US200913120720
申请日期
2009.09.24
申请人
TOKYO INSTITUTE OF TECHNOLOGY;JX NIPPON OIL & ENERGY CORPORATION
