| 摘要 |
A wafer holding apparatus for holding a wafer in a semiconductor fabrication apparatus includes a stage having a wafer receiving area with a large number of apertures. A gas, supply source supplies gas to the apertures to levitate the wafer by gas pressure. The levitated wafer is held in contact with a retainer disposed above a peripheral part of the wafer receiving area by the gas pressure, which the retainer resists. The wafer is thereby held securely even when the stage is moved, and the surface configuration of the wafer is not affected by the presence of foreign matter between the wafer and stage.
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