ELECTROSTATIC CHUCK

摘要

Disclosed is an electrostatic chuck comprising a ceramic dielectric provided with an electrode on the surface thereof, a ceramic substrate for supporting the ceramic dielectric body, and a first bonding agent for bonding the ceramic dielectric body and the ceramic substrate. The first bonding agent comprises a principal agent containing organic material, an amorphous filler containing inorganic material, and a globular filler containing inorganic material. The first amorphous filler and the first globular filler are distributed in the first principal agent. The first principal agent, the first amorphous filler, and the first globular filler comprise electrically insulating material. The average diameter of the first globular filler particles is greater than the maximum value for the minor axis of the first amorphous filler particles, and the thickness of the first bonding agent is equal to or greater than the average diameter of the first globular filler particles.