| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a three-dimensional profile measuring device for easily performing measurement even if a measurement target including places having different reflection factors is measured. <P>SOLUTION: A light interference measuring device 1 includes: a light emission part 10 for outputting wideband light; an objective lens part 30 that branches the wideband light to a reference optical path having a reference mirror 32 and a measurement optical path where the measurement target W is disposed and outputting reflection light from the reference mirror 32 and reflection light from the measurement target W as a synthetic wave; a drive mechanism part 50 for changing optical path length of one of the reference optical path and the measurement optical path; and an imaging part 40 for capturing an interference image. The light interference measuring device 1 includes: a phase difference control member 34 for controlling a phase difference between reflection light from the reference mirror 32 and that from the measurement target W to generate dark interference fringes at a position where an optical path difference is zero in the objective lens part 30; and a peak position detection program 732 for detecting a peak position of dark interference fringes generated at the position where the optical path difference is zero, based on the captured interference image. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
