| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and downsized thermopile type infrared sensor which can accurately perform measurement with good sensitivity by reducing an influence of infrared rays on a cold junction of a thermopile. SOLUTION: In a thermopile forming part, only a predetermined region containing a side of the cold junction is covered with an infrared ray-shielding layer. The infrared ray-shielding layer has a configuration being connected with a metal pedestal and a metal. Heat of the infrared ray-shielding layer is effectively dissipated. Therefore, the configuration is such that the temperature of the infrared ray-shielding layer is unlikely to propagate to the side of the cold junction, temperature rise of the cold junction can be prevented, the configuration is simple and the production cost is lowered, and the configuration can be downsized with assuring strength of a sensor element. COPYRIGHT: (C)2011,JPO&INPIT
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