发明名称 Semiconductor Device And Method Of Fabricating The Same
摘要 A method of fabricating a semiconductor device includes forming an interlayer dielectric on a substrate, the interlayer dielectric including first and second openings respectively disposed in first and second regions formed separately in the substrate; fondling a first conductive layer filling the first and second openings; etching the first conductive layer such that a bottom surface of the first opening is exposed and a portion of the first conductive layer in the second opening remains; and forming a second conductive layer filling the first opening and a portion of the second opening.
申请公布号 US2011237062(A1) 申请公布日期 2011.09.29
申请号 US201113069848 申请日期 2011.03.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NA HOONJOO;HYUN SANGJIN;SHIN YUGYUN;PARK HONGBAE;HONG SUGHUN;LEE HYE-LAN;HONG HYUNG-SEOK
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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