MICROELECTROMECHANICAL (MEMS) PRESSURE TRANSDUCER

摘要

A pressure transducer for measuring pressure may include an all-polymer chamber that has no dimension greater than 1 mm. There may be fluid within the chamber, a gaseous bubble trapped within the fluid, and electrodes in contact with the fluid. The electrodes may enable a measurement of changes in the impedance of the fluid caused by changes in the volume of the gaseous bubble caused by changes in the pressure to be measured. The pressure transducer may be made by depositing the chamber, placing the fluid within the chamber, and generating the gaseous bubble within the fluid with electrolysis.