发明名称 SEMICONDUCTOR LASER ELEMENT AND METHOD OF MANUFACTURING THEREOF
摘要 A semiconductor laser element having; a substrate, a semiconductor layer laminated a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer in that order on the substrate, a stripe-like ridge formed on the upper face of the second conductivity type semiconductor layer, a conductive oxide layer formed on the upper face of the ridge, a dielectric layer, with a refractive index that is lower than the refractive index of the semiconductor layer, formed on the side faces of the ridge, and a metal layer formed so as to cover the conductive oxide layer and the dielectric layer, the surface of the conductive oxide layer is exposed from the dielectric layer, and the side faces of the conductive oxide layer are sloped with respect to the upper face of the ridge, and the inclination angle of the side faces of the conductive oxide layer with respect to the normal direction is greater than the inclination angle of the side faces of the ridge with respect to the normal direction.
申请公布号 US2011235666(A1) 申请公布日期 2011.09.29
申请号 US201113051805 申请日期 2011.03.18
申请人 NICHIA CORPORATION 发明人 SONOBE SHINYA;MASUI SHINGO;MIYOSHI TAKASHI
分类号 H01S5/343;H01L33/06 主分类号 H01S5/343
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