| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an evaluating device capable of making precise evaluation to determine whether a subject to be processed can be processed into a desired shape using a formed resist pattern. <P>SOLUTION: The evaluating device includes a resist pattern data obtaining unit 33 which obtains resist pattern data having a plurality of feature quantities including at least two of feature quantities of a hole diameter and an aspect ratio based on a given signal threshold measured on a hole forming pattern in resist patterns formed on a subject to be processed and a difference between hole diameters based on a plurality of signal thresholds, and an evaluating unit 34 which substitutes the obtained resist pattern data in an evaluation function parameter containing the plurality of feature quantities as parameters and evaluating the presence/absence of a possibility that a hole pattern formed on the subject to be processed using the hole forming pattern remains unopened, calculates an evaluation value on the hole forming pattern, and then evaluates the presence/absence of the possibility that the hole pattern formed on the subject to be processed remains unopened based on the evaluation value. <P>COPYRIGHT: (C)2011,JPO&INPIT |
