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发明名称
ELECTROSTATIC CHUCK
摘要
申请公布号
KR20110106718(A)
申请公布日期
2011.09.29
申请号
KR20100025916
申请日期
2010.03.23
申请人
WONIK IPS CO., LTD.
发明人
PARK, YONG GYUN;CHO, SAENG HYUN
分类号
H01L21/687;B23Q3/15;H02N13/00
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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