| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat insulator improved in heat insulation to suppress the dissipation of heat from an area to be heat insulated such as the outer wall surface of a processing container to the outside. <P>SOLUTION: A metal foil 13 formed of a material such as aluminum which is configured so that the atmosphere of the inside thereof is vacuum is provided, and a resin sheet 16, for example, a polyimide sheet is provided so as to cover the metal foil 13A for vacuum thermal insulation and for suppressing the dissipation of heat from the metal foil 13. The heat transferred from the processing container 1 is reflected by an aluminum layer 33 toward the processing container 1 and when the heat of the processing container 1 cannot be fully reflected and the temperature of the aluminum layer 33 is raised, the dissipation of heat to the outside can be suppressed by laminating the aluminum layer 33 and a resin layer 34 in a heat insulation block 30 from the processing container 1 side in this order. <P>COPYRIGHT: (C)2011,JPO&INPIT |
