THIN FILM DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin film deposition apparatus that may be simply applied to produce large-sized display devices on a mass scale and with improved yield.

SOLUTION: The thin film deposition apparatus includes: a deposition source 110 that discharges a deposition material 115; a deposition source nozzle unit 120 disposed at a side of the deposition source 110 and including a plurality of deposition source nozzles 121; a patterning slit sheet 150 disposed opposite to and spaced apart from the deposition source nozzle unit 120 and including a plurality of patterning slits 151; a barrier plate assembly 130 comprising a plurality of barrier plates 131 that are disposed between the deposition source nozzle unit 120 and the patterning slit sheet 150, and that partition a space between the deposition source nozzle unit 120 and the patterning slit sheet 150 into a plurality of sub-deposition spaces; a position detection member that detects a relative position of the substrate 500 to the patterning slit sheet 150; and an alignment control member that controls a relative position of the patterning slit sheet 150 to the substrate 500.

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