| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminate that prevents layers between a polyimide substrate and a conductive film layer from peeling. SOLUTION: The method of manufacturing a laminate includes: an alkali treatment step in which an alkali-treated layer is formed on the surface of the polyimide substrate 2 by bringing the surface of the substrate 2 into contact with an alkaline aqueous solution; a catalyst-applying step in which the alkali-treated layer is brought into contact with an aqueous solution containing a metal catalyst to apply the metal catalyst to the alkali-treated layer; a reduction step in which the alkali-treated layer to which the metal catalyst is applied is brought into contact with a reduction treatment solution to reduce the metal catalyst to which the alkali-treated layer is applied, to form a first surface-treated layer 3; a plasma step in which the surface of the first surface-treated layer 3 is treated with plasma to form a second surface-treated layer; a seed-layer forming step in which a seed layer 5 is laminated on the surface-treated layers; and a metal-layer forming step in which a metal layer 6 is laminated on the seed layer. COPYRIGHT: (C)2011,JPO&INPIT |
