Method for manufacture of photovoltaic cell, involves forming intrinsic layer between two conductive layers of different conductance, and separating one of conductive layers and one portion of intrinsic layer in separation chamber

摘要

The method involves forming an intrinsic layer (112) between two conductive layers (111,113) of different conductance. One of the conductive layers and one portion of intrinsic layer are separated in a separation chamber including hydrogen plasma.