摘要 |
<p>The present invention relates to a light-shielding film-attached glass substrate including: a glass substrate; and a light-shielding film having a multilayer structure and being formed on the glass substrate, in which the light-shielding film having a multilayer structure includes: a first chromium oxynitride film (CrOx1Ny1); and a second chromium oxynitride film (CrOx2Ny2), each satisfying the following conditions and being laminated in this order from the glass substrate side: 0.15<x1<0.5, 0.1<y1<0.35, 0.4<x1+y1<0.65, 0.03<x2<0.15, and 0.09<y2<0.25.</p> |