TRANSFER APPARATUS AND METHOD, AND COMPUTER PROGRAM

摘要

Disclosed is a transfer apparatus (1) which transfers a pattern formed on a mold (200a) to a subject to which the pattern is to be transferred (300). The transfer apparatus is provided with: mold holding means (154a, 153a) which hold the mold; subject holding means (120a, 120b) which hold the subject to which the pattern is to be transferred; mold-releasing means (104, 120a) which perform mold-releasing with respect to the adhered mold and the subject; and a cancel control means (102) which supplies cancel signals for cancelling holding of the subject to the mold holding means and/or the subject holding means in the case where mold-releasing is not completed.