发明名称 |
OPTICAL ELEMENT HOLDING APPARATUS, BARREL, EXPOSURE APPARATUS, AND MANUFACTURING METHOD FOR DEVICE |
摘要 |
An optical element holding apparatus includes an annular vibration attenuation plate, which covers a peripheral portion of a lens, and a connection member, which is formed of a damping alloy and which fixes the vibration attenuation plate to a frame body in a state of non-contact with the surface of the lens. The vibration attenuation plate and nitrogen gas in a clearance between the vibration attenuation plate and the surface of the lens form a squeeze film damper.
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申请公布号 |
US2011235014(A1) |
申请公布日期 |
2011.09.29 |
申请号 |
US201113159305 |
申请日期 |
2011.06.13 |
申请人 |
ARAI YOUICHI |
发明人 |
ARAI YOUICHI |
分类号 |
G03B27/54;G02B7/02;G03B27/32 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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