发明名称 |
METHOD FOR CLEANING A VACUUM PUMP |
摘要 |
A method for cleaning a vacuum pump (10) having a pump chamber (12) with at least one pump rotor (14) includes performing the steps of: a) filling a cleaning liquid (28) into the pump chamber (12), b) distributing the cleaning liquid (28) in the pump chamber (12), c) dissolving impurities with the cleaning liquid (28), d) draining the cleaning liquid (28) from the pump chamber (12).
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申请公布号 |
US2011232689(A1) |
申请公布日期 |
2011.09.29 |
申请号 |
US200913126265 |
申请日期 |
2009.10.27 |
申请人 |
OERLIKON LEYBOLD VACUUM GMBH;OERLIKON SOLAR AG, TRUEBBACH |
发明人 |
KANNEN INGO;GOETTLICH HAGEN;SCHNEIDER STEFAN |
分类号 |
B08B9/00 |
主分类号 |
B08B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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