| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding apparatus advantageous in terms of positioning accuracy of a holding object member for temperature change. SOLUTION: The holding apparatus 100 is configured to hold a member so that a distance from a reference point P12 of a structure 300 to a reference point P11 of the member 200 in a direction along a reference axis AX is kept at a constant value, the holding apparatus including holding sections 110, each being supported by the structure, including an inclined surface 110a that is inclined relative to a plane orthogonal to the reference axis, and being configured to hold the member via the inclined surface, wherein the inclination angles of the inclined surfaces are set so that the distance will be kept at the constant value even if temperature of the member and the holding sections change from a first temperature to a second temperature, on the basis of a thermal expansion coefficient and shape of the member and a thermal expansion coefficient and shape of the holding sections. COPYRIGHT: (C)2011,JPO&INPIT |
