发明名称 Phase-shifting element and particle beam device having a phase-shifting element
摘要 A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
申请公布号 US2011233402(A1) 申请公布日期 2011.09.29
申请号 US20110931046 申请日期 2011.01.20
申请人 SCHROEDER RASMUS;BARTON BASTIAN;BENNER GERD;ROSE HARALD 发明人 SCHROEDER RASMUS;BARTON BASTIAN;BENNER GERD;ROSE HARALD
分类号 H01J37/26 主分类号 H01J37/26
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