DYNAMIC QUANTITY SENSOR AND MANUFACTURING METHOD THEREFOR

摘要

Disclosed is a dynamic quantity sensor that can be manufactured inexpensively and can detect the magnitude, direction, and acceleration of an outside force. Also disclosed is a method for manufacturing said dynamic quantity sensor. The disclosed dynamic quantity sensor is provided with: a first substrate; a fixed part disposed on top of the first substrate; a spiral-shaped movable electrode which is disposed at a separation from the first substrate and one end of which is supported by the fixed part; fixed electrodes disposed around the movable electrode in directions in which to detect dynamic quantities; a first terminal electrically connected to the fixed part, and a second terminal electrically connected to the fixed electrode.