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发明名称
METHOD FOR MANUFACTURING SOI WAFER, AND SOI WAFER
摘要
申请公布号
EP2320450(A4)
申请公布日期
2011.09.28
申请号
EP20090809473
申请日期
2009.07.29
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
OKA, SATOSHI;KUWABARA, SUSUMU
分类号
H01L21/02;H01L21/205;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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