Method for automatic approaching of probe surface inspection system, apparatus for automatic approaching of probe surface inspection system and scanning probe microscope comprising the same,申请号KR20090011319-传众专利搜索

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发明名称	Method for automatic approaching of probe surface inspection system, apparatus for automatic approaching of probe surface inspection system and scanning probe microscope comprising the same
摘要
申请公布号	KR101068518(B1)	申请公布日期	2011.09.28
申请号	KR20090011319	申请日期	2009.02.12
申请人		发明人
分类号	G01Q10/00;G01N21/00;H01L21/26	主分类号	G01Q10/00
代理机构		代理人
主权项
地址

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