INCREASING DIE STRENGTH BY ETCHING DURING OR AFTER DICING,申请号EP20050808203-传众专利搜索

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发明名称	INCREASING DIE STRENGTH BY ETCHING DURING OR AFTER DICING
摘要
申请公布号	EP1825507(B1)	申请公布日期	2011.09.28
申请号	EP20050808203	申请日期	2005.11.01
申请人	ELECTRO SCIENTIFIC INDUSTRIES, INC.	发明人	BOYLE, ADRIAN;GILLEN, DAVID;DUNNE, KALI;FERNANDES GOMEZ, EVA;TOFTNESS, RICHARD
分类号	H01L21/78;H01L21/3065	主分类号	H01L21/78
代理机构		代理人
主权项
地址

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