POSITION CONTROL APPARATUS INCLUDING ITERATIVE LEARNING CIRCUIT, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING DEVICE, AND ITERATIVE LEARNING METHOD FOR USE IN POSITION CONTROL APPARATUS HAVING ITERATIVE LEARNING CIRCUIT INCLUDING LEARNING FILTER,申请号KR20090016881-传众专利搜索

发明名称	POSITION CONTROL APPARATUS INCLUDING ITERATIVE LEARNING CIRCUIT, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING DEVICE, AND ITERATIVE LEARNING METHOD FOR USE IN POSITION CONTROL APPARATUS HAVING ITERATIVE LEARNING CIRCUIT INCLUDING LEARNING FILTER
摘要
申请公布号	KR101068319(B1)	申请公布日期	2011.09.28
申请号	KR20090016881	申请日期	2009.02.27
申请人		发明人
分类号	H01L21/027;G03F7/20;H01L21/683;H01L21/687	主分类号	H01L21/027
代理机构		代理人
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