| 摘要 |
Disclosed are a hard film and a method useful for manufacturing the hard film wherein the hard film is obviously excellent in wear resistance, and exhibits excellent oxidation resistance even under a condition where hot heat generation tends to occur due to friction heating, consequently exhibits excellent properties compared with a usual hard-film including TiAlN, TiCrAlN, TiCrAlSiBN, CrAlSiBN, or NbCrAlSiBN. The hard film includes (M)aCrbAlcSidBeYfZ (however, M is at least one element selected from a group 4A element, a group 5A element, and a group 6A element (except for Cr) in the periodic table, and Z shows one of N, CN, NO and CNO), wherein a+b+c+d+e+f=1, and 0<a≦̸0.3, 0.05≦̸b≦̸0.4, 0.4≦̸c≦̸0.8, 0≦̸d≦̸0.2, 0≦̸e≦̸0.2, and 0.01≦̸f≦̸0.1, (a, b, c, d, e and f show atomic ratios of M, Cr, Al, Si, B and Y respectively).
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