发明名称 Multiple vacuum evaporation coating device and method for controlling the same
摘要 A multiple vacuum evaporation coating device and a method for controlling the same. The vacuum evaporation coating device includes a plurality of evaporation sources, a rotating part adapted to rotate the plurality of evaporation sources and a coating block plate adapted to block all but one of said plurality of evaporation sources at any time, each of the plurality of evaporation sources comprise a case, a melting pot arranged within said case, an evaporation material arranged within the melting pot, a heating device arranged outside the melting pot and adapted to heat and evaporate the evaporation material, and a cooling device adapted to block heat generated by the heating device from transferring to an outside.
申请公布号 US8025735(B2) 申请公布日期 2011.09.27
申请号 US20060370033 申请日期 2006.03.08
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 LEE SUNG HO;KIM SU HWAN;HWANG MIN JEONG
分类号 C23C16/00 主分类号 C23C16/00
代理机构 代理人
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