发明名称 Carrying system, substrate treating device, and carrying method
摘要 A carrying system 1 has a carrying path which is laid out in such a manner as to pass through the lower sides of loading table 11 and the like provided at the front face side of treating devices 10, 100, 200, and covered by a cover 5. As the carrying path is positioned below the loading tables, the occupying areas of the loading table 11 and the like and portions of the region of the carrying path are shared so that space saving is achieved, and the accessibility to the treating device 10, 100 or the like from the front side thereof is improved, thereby realizing a layout which facilitates maintenance. A loading surface 11d or the like of the loading table 11 is set to a height which allows a conventional overhead-type carrying system 2 and unmanned carrying vehicle 3 of a floor-type carrying system to load an object on the loading surface, thereby ensuring the co-existence with the other carrying systems.
申请公布号 US8025473(B2) 申请公布日期 2011.09.27
申请号 US20050666163 申请日期 2005.10.25
申请人 TOKYO ELECTRON LIMITED 发明人 ASAKAWA TERUO
分类号 B65G1/00;B65G49/06;H01L21/68 主分类号 B65G1/00
代理机构 代理人
主权项
地址