发明名称 Fabrication method of semiconductor device having conductive bumps
摘要 A semiconductor device having conductive bumps and a fabrication method thereof are provided. The fabrication method mainly including steps of: providing a semiconductor substrate having a solder pad and a passivation layer formed thereon with a portion of the solder pads exposed from the passivation layer; disposing a first metal layer on the solder pad and a portion of the passivation layer around the solder pad; disposing a covering layer on the first metal layer and the passivation layer, and forming an aperture in the covering layer to expose a portion of the first metal layer, wherein a center of the aperture is deviated from that of the solder pad; deposing a metal pillar on the portion of the first metal layer; and deposing a solder material on an outer surface of the metal pillar for providing a better buffering effect.
申请公布号 US8026602(B2) 申请公布日期 2011.09.27
申请号 US20100872164 申请日期 2010.08.31
申请人 SILICONWARE PRECISION INDUSTRIES CO., LTD. 发明人 KE CHUN-CHI;HUANG CHIEN-PING
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
代理机构 代理人
主权项
地址