发明名称 |
Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer |
摘要 |
A device for heat treating (annealing) a III-V semiconductor wafer comprises at least one wafer support unit which is dimensioned such that a cover provided above the wafer surface is either spaced without any distance or with a distance of maximally about 2 mm to the wafer surface. A process for heat treating III-V semiconductor wafers having diameters larger than 100 mm and a dislocation density below 1×104 cm−2 is carried out in the device of the invention. SI GaAs wafers produced have an at least 25% increased characteristic fracture strength (Weibull distribution), an improved radial macroscopic and mesoscopic homogeneity and an improved quality of the mechano-chemically polished surface. The characteristic fracture strength is higher than 1900 MPa.
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申请公布号 |
US8025729(B2) |
申请公布日期 |
2011.09.27 |
申请号 |
US20060478449 |
申请日期 |
2006.06.30 |
申请人 |
FREIBERGER COMPOUND MATERIALS GMBH |
发明人 |
JURISCH MANFRED;EICHLER STEFAN;BUENGER THOMAS;WEINERT BERNDT;BOERNER FRANK |
分类号 |
C30B23/00;B32B3/00;B32B17/10;C30B25/00 |
主分类号 |
C30B23/00 |
代理机构 |
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