| 摘要 |
The present invention relates to a hydrogen sensor and to a method for fabricating the hydrogen sensor. According to the method, a thin film made of a transition metal or transition metal alloy is disposed on a surface of a substrate made of an elastic material, and then tensile force is applied to the substrate to form a nanogap in the thin film. The hydrogen sensor detects hydrogen through the nanogap. The method uses a simpler process than typical methods for fabricating hydrogen sensors such as a semiconductor-type method, a catalytic-combustion-type method, a field effect transistor (FET)-type method, an electrolyte-type (electrochemical) method, an optical-fiber-type method, a piezoelectric-type method, and a thermoelectric-type method. The disclosed hydrogen sensor is smaller, more economical, and more convenient than commercialized hydrogen sensors such as a catalytic-combustion-type hydrogen sensor, a combination hydrogen sensor of a palladium (Pd) alloy and a thermal plate, a solid phase hydrogen sensor of a Pd/Ag alloy, and a Pd gate FET hydrogen sensor. As only tensile force is briefly applied to the substrate to form a uniformly shaped nanogap in the thin film of a transition metal or of a transition metal alloy on the substrate, a high-performance hydrogen sensor can be fabricated at an extremely low cost. |
