发明名称 |
Vibrator, resonator using the same and electromechanical filter using the same |
摘要 |
An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.
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申请公布号 |
US8026779(B2) |
申请公布日期 |
2011.09.27 |
申请号 |
US20070304602 |
申请日期 |
2007.06.14 |
申请人 |
PANASONIC CORPORATION |
发明人 |
NAKAMURA KUNIHIKO;MATSUO MICHIAKI;NAKANISHI YOSHITO;HASHIMURA AKINORI |
分类号 |
H03H9/24;H01L29/06;H03H9/46 |
主分类号 |
H03H9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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