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发明名称
method for forming a gate electrode of semiconductor device
摘要
申请公布号
KR101068136(B1)
申请公布日期
2011.09.27
申请号
KR20040022833
申请日期
2004.04.02
申请人
发明人
分类号
H01L21/336
主分类号
H01L21/336
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代理人
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